Specializing in Piezo Stages and Nanopositioning Solutions


XY piezo stage developed for rapid scanning in alignment tools

Product Specs
Part Number 3715498
Footprint 84mm W x 84mm D x 18mm H
Aperture 27mm ∅
Material Stainless Steel
Maximum Load 1kg
Max Force (Push/Pull) 100N/70N
Stage Mass 520g
Nanomotion Control XY
Closed-loop Travel 90µm|90µm
Open-loop Travel (-30 to 150 V) 120µm|120µm
Position Noise 0.5nm|0.5nm
Stiffness 2.3N/µm|2.3N/µm
Resonant Frequency 900Hz|900Hz
Settling Time 4ms|4ms
Linearity Deviation 0.01%|0.01%
Capacitance 4.3µF|4.3µF
Integrated Sensor Capacitive
Cable Length 2m
Controller LC.402

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