Specializing in Piezo Stages and Nanopositioning Solutions


Closed-loop XYZ nanopositioner for space contrained applications.

Product Specs
Part Number 3715272
Footprint 37mm W X 37 mm D X 48.3mm H
Material Stainless Steel
Maximum Load 0.5kg
Max Force (Push/Pull) 100N/10N
Stage Mass 290g
Nanomotion Control XYZ
Closed-loop Travel 80µm|80µm|5µm
Open-loop Travel (-30 to 150 V) 125µm|125µm|10µm
Position Noise 0.3nm|0.3nm|0.07nm
Stiffness 0.6N/µm|0.5N/µm|7.1N/µm
Resonant Frequency 400Hz|450Hz|2000Hz
Settling Time 10ms|10ms|3ms
Linearity Deviation 0.01%|0.01%|0.5%
Capacitance 1.5µF|1.5µF|2.4µF
Integrated Sensor Capacitive
Cable Length 2m
Controller LC.403

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