Skip to Content
Hexagonal shapes

NPXY200Z50-270

Large-aperture 3-axis piezo stage

NPXY200Z50-270 Nanopositioning Piezo Stage

Large aperture XYZ nanopositioning piezo stage developed for scanning probe and optical microscopy applications.

Request Quote

Large aperture XYZ nanopositioning piezo stage developed for scanning probe and optical microscopy applications.

Part Number3715270
Footprint140mm W x 140mm D x 38mm H
DiameterNA
Aperture68mm W x 68mm D
MaterialAluminum
Maximum Load5kg
Max Force (Push/Pull)100N/20N
Stage Mass1060g
Nanomotion ControlXYZ
Closed-loop Travel200µm|200µm|50µm
Open-loop Travel (-30 to 150 V)240µm|240µm|80µm
Position Noise0.7nm|0.7nm|0.3nm
Stiffness1.0N/µm|1.8N/µm|4.7N/µm
Resonant Frequency350Hz|350Hz|500Hz
Settling Time15ms|15ms|10ms
Linearity Deviation0.01%|0.01%|0.02%
Capacitance7.5µF|7.5µF|4.8µF
Integrated SensorCapacitive
Cable Length2m
ControllerLC.403

Related Resources:

Announcement