Specializing in Piezo Stages and Nanopositioning Solutions


Ultra-precise XYZ nanopositioning piezo stage developed for metrology applications.

Product Specs
Part Number 3715103
Footprint 100mm W x 100mm D x 35mm H
Diameter NA
Aperture 38mm ∅
Material Aluminum
Maximum Load 1kg
Max Force (Push/Pull) 100N/20N
Stage Mass 560g
Nanomotion Control XYZ
Closed-loop Travel 200µm|200µm|25µm
Open-loop Travel (-30 to 150 V) 270µm|270µm|35µm
Position Noise 0.5nm|0.5nm|0.1nm
Stiffness 0.5N/µm|0.5N/µm|13.1N/µm
Resonant Frequency 350Hz|350Hz|1600Hz
Settling Time 15ms|15ms|2ms
Linearity Deviation 0.01%|0.01%|0.04%
Capacitance 7.5µF|7.5µF|3.1µF
Integrated Sensor Capacitive
Cable Length 2m
Controller LC.403

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