Specializing in Piezo Stages and Nanopositioning Solutions


Ultra-precise XY nanopositioning piezo stage developed for metrology applications.

Product Specs
Part Number 3715101
Footprint 100mm W x 100mm D x 23mm H
Diameter NA
Aperture 40mm ∅
Material Aluminum
Maximum Load 1kg
Max Force (Push/Pull) 100N/20N
Stage Mass 460g
Nanomotion Control XY
Closed-loop Travel 200µm|200µm
Open-loop Travel (-30 to 150 V) 290µm|290µm
Position Noise 0.5nm|0.5nm
Stiffness 0.5N/µm|0.5N/µm
Resonant Frequency 400Hz|400Hz
Settling Time 15ms|15ms
Linearity Deviation 0.01%|0.01%
Capacitance 3.1µF|3.1µF
Integrated Sensor Capacitive
Cable Length 2m
Controller LC.402

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