Specializing in Piezo Stages and Nanopositioning Solutions


Large aperture XYZ nanopositioning piezo stage developed for scanning probe and optical microscopy applications.

Product Specs
Part Number 3715264
Footprint 140mm W x 140mm D x 35mm H
Aperture 68mm W x 68mm D
Material Aluminum
Maximum Load 1 kg
Nanomotion Control XYZ
Closed-loop Travel 100µm|100µm|25µm
Position Noise 0.3nm|0.3nm|0.2nm
Resonant Frequency 450Hz|450Hz|700Hz
Settling Time 10ms|10ms|5ms
Linearity Deviation 0.02%|0.02%|0.02%
Controller LC.403

Pin It on Pinterest