Specializing in Piezo Stages and Nanopositioning Solutions

Description

Ultra-precise XYZ nanopositioning piezo stage developed for metrology applications.

Product Specs
Part Number 3715102
Footprint 100mm W x 100mm D x 35mm H
Diameter NA
Aperture 38mm ∅
Material Aluminum
Maximum Load 1kg
Max Force (Push/Pull) 100N/10N
Stage Mass 560g
Nanomotion Control XYZ
Closed-loop Travel 100µm|100µm|25µm
Open-loop Travel (-30 to 150 V) 130µm|130µm|35µm
Position Noise 0.3nm|0.3nm|0.1nm
Stiffness 1.3N/µm|1.3N/µm|15.5N/µm
Resonant Frequency 500Hz|500Hz|1600Hz
Settling Time 8ms|8ms|3ms
Linearity Deviation 0.01%|0.01%|0.04%
Capacitance 4.8µF|4.8µF|3.1µF
Integrated Sensor Capacitive
Cable Length 2m
Controller LC.403

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