Specializing in Piezo Stages and Nanopositioning Solutions

Description

Ultra-precise XY nanopositioning piezo stage developed for metrology applications.

Product Specs
Part Number 3715100
Footprint 100mm W x 100mm D x 23mm H
Diameter NA
Aperture 40mm ∅
Material Aluminum
Maximum Load 1kg
Max Force (Push/Pull) 100N/20N
Stage Mass 460g
Nanomotion Control XY
Closed-loop Travel 100µm|100µm
Open-loop Travel (-30 to 150 V) 160µm|160µm
Position Noise 0.3nm|0.3nm
Stiffness 1.2N/µm|1.2N/µm
Resonant Frequency 700Hz|700Hz
Settling Time 6ms|6ms
Linearity Deviation 0.01%|0.01%
Capacitance 2.4µF|2.4µF
Integrated Sensor Capacitive
Cable Length 2m
Controller LC.402

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