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Hexagonal shapes

nPX100

Compact piezo stage

Compact nanopositioning piezo stage with 100µm range.

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Compact nanopositioning piezo stage with 100µm range.

Part Number3715515
Footprint40mm W x 40mm D x 17mm H
MaterialAluminum/SS
Maximum Load1 kg
Max Force (Push/Pull)100N/15N
Stage Mass75g
Nanomotion ControlZ
Closed-loop Travel100µm
Open-loop Travel (-30 to 150 V)140µm
Position Noise3nm
Stiffness0.6N/µm
Resonant Frequency1000Hz
Settling Time5ms
Linearity Deviation0.05%
Capacitance1.5µF
Integrated SensorStrain Gauge
Cable Length2m
ControllerLC.400

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