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Hexagonal shapes

NPXY200-101

High-precision piezo stage

NPXY200-101 Nanopositioning Piezo Stage

Ultra-precise XY nanopositioning piezo stage developed for metrology applications.

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Ultra-precise XY nanopositioning piezo stage developed for metrology applications.

Part Number3715101
Footprint100mm W x 100mm D x 23mm H
DiameterNA
Aperture40mm ∅
MaterialAluminum
Maximum Load1kg
Max Force (Push/Pull)100N/20N
Stage Mass460g
Nanomotion ControlXY
Closed-loop Travel200µm|200µm
Open-loop Travel (-30 to 150 V)290µm|290µm
Position Noise0.5nm|0.5nm
Stiffness0.5N/µm|0.5N/µm
Resonant Frequency400Hz|400Hz
Settling Time15ms|15ms
Linearity Deviation0.01%|0.01%
Capacitance3.1µF|3.1µF
Integrated SensorCapacitive
Cable Length2m
ControllerLC.402

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