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Hexagonal shapes

NPXY100Z10-128

Large-aperture 3-axis piezo stage

NPXY100Z10-128 Nanopositioning Piezo Stage

Large aperture XYZ nanopositioning piezo stage developed for scanning probe and optical microscopy applications.

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Large aperture XYZ nanopositioning piezo stage developed for scanning probe and optical microscopy applications.

Part Number3715128
Footprint140mm W x 140mm D x 30mm H
DiameterNA
Aperture68mm W x 68mm D
MaterialAluminum
Maximum Load5kg
Max Force (Push/Pull)100N/20N
Stage Mass870g
Nanomotion ControlXYZ
Closed-loop Travel100µm|100µm|10µm
Open-loop Travel (-30 to 150 V)160µm|160µm|15µm
Position Noise0.3nm|0.3nm|0.1nm
Stiffness3.0N/µm|3.0N/µm|6.2N/µm
Resonant Frequency600Hz|600Hz|900Hz
Settling Time10ms|10ms|5ms
Linearity Deviation0.01%|0.01%|0.02%
Capacitance4.8µF|4.8µF|1.0µF
Integrated SensorCapacitive
Cable Length2m
ControllerLC.403

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