Upgrages for Dimension 3100
Part Number
XY Travel (µm)
Z Travel (µm)
Description
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iCXY100-D31
100
-
Extremely low scanner bow (vacuum chuck available).
iCXY200-D31
200
-
iCXY100Z25-D31
100
25
Requires AFM frame spacer for Veeco AFMs.
iCXY200Z25-D31
200
25
Requires AFM frame spacer for Veeco AFMs.
iCXY100VC-D31
100
-
Scanner with integrated vacuum chuck.
iCXY400Z100-D31
400
100
Extremely large XYZ scanning range. May require special tips.
iCXY100LA-D31
100
-
Low profile scanner.
iCXY100Z10-D31
100
10
iCXY400-D31
400
-
Extremely large XY scanning range.
iCXY100Z10-D31
100
10
Scanner with integrated vacuum chuck.
iCXY150Z10-D31
150
10
