Upgrages for Dimension 3000
Part Number
XY Travel (µm)
Z Travel (µm)
Description
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iCXY100-D30
100
-
Extremely low scanner bow (vacuum chuck available).
iCXY200-D30
200
-
Small scanner bow.
iCXY100Z25-D30
100
25
Requires AFM frame spacer for Veeco AFMs.
iCXY200Z25-D30
200
25
Requires AFM frame spacer for Veeco AFMs.
