The highest rate of the position change of a nanopositioner. It is measured from the response to a large step signal.
The time for stage to move to a commanded position and settle to within 2% of its final value of the step size. A small signal step response reflects the dynamic characteristics of the system in more detail. Therefore, small signal settling time is normally used in the specifications of nPoint’s nanopositioning products — the […]
The displacement per unit of command. The scale factors of nPoint’s nanopostioners are calibrated with a laser interferometer.
The first (or the lowest) resonant frequency of a nanopositioner. The resonant frequency could be of the mode along the motion axis or in other axes including rotation and other complex modes. In general, the higher the resonant frequency of a system, the higher the stability and the wider working bandwidth the system will have. […]
The minimum step size the stage can move. It is usually defined by the position noise.
The maximum displacement of the nanopositioners with the performance specified.
The angular offset of two defined motion axes from being orthogonal to each other. It can be interpreted as a part of crosstalk.
The amplitude of the stage shaking when it is on a static command. It is usually measured and specified with RMS (1 σ) value. It is commonly used to define the resolution of the nanopositioners and is a combination of sensor noise, driver electronics noise and command noise, etc.
The error between the actual position and the first-order best fit line (straight line). nPoint’s nanopositioning products are calibrated with laser interferometry and the non linearity errors are compensated with a fourth order polynomial.
The positioning error between forward scan and backward scan. A closed-loop control is an ideal solution for the problem. Capacitance sensors are normally used in nPoint’s nanopositioners to provide feedback signals. It is a non-contact displacement measurement technique, which is hysteresis free.